- Transmission electron microscope (Jeol F200 S/TEM)
High resolution TEM/STEM suitable for very thin samples (<100 nm) able to provide atomic scale (0.1 nm) information on the structure and chemical composition (ED, EDS, EELS).
Jeol Dual EDS system and Gatan Enfinium EELS.
Holders: double-tilt, tomography, heating and cryo
Contact: Mari Honkanen
- Analytical High Resolution Scanning electron microscope (Zeiss UltraPlus FE-SEM)
High resolution SEM for material characterization. Provides information on surface topography SEM/STEM with resolution down to 1 nm. Analysis of elemental composition (Oxford Instruments X-MaxN 80 EDS) and crystallography (Oxford Instruments Symmetry CMOS EBSD).
Imaging detectors: ET, Inlens, ASB, ESB, STEM
Contact: Mari Honkanen
- Focused ion beam microscope, FIB-SEM (Zeiss Crossbeam 540)
High resolution SEM with focused ion beam for nano/micromilling of materials. Imaging resolution of 1 nm and processing resolution of few nanometers.
The system enables cross-sectioning, 3D imaging and 3D EDS (Oxford Instruments X-MaxN 80) analysis, nanopatterning, TEM lamella preparation. Includes manipulators suitable for electron beam induced current (EBIC) measurements.
Imaging detectors: ET, Inlens, ESB, STEM
Contact: Turkka Salminen
- Scanning electron microscopes
Variable pressure Tungsten-filament SEM with EDS, Jeol IT500 (In Konetalo 2nd floor, contact Mari Honkanen)
Tungsten-filament SEM with EDS, Tescan Vega (In TMC, contact Turkka Salminen)
Zeiss Ultra55 FE-SEM with Raith e-beam lithography Reserved for e-beam and clean room users (In TUT Clean Room, contact Turkka Salminen)
LEO 1450 SEM with Alemnis In-situ Nanoindenter Reserved for in situ materials testing (In TMC, contact Gaurav Mohanty)
- Raman microscope (Renishaw InVia Qontor)
Raman spectroscopy is based on inelastic scattering of monochromatic light. The measured spectra give information about the chemical bonds and crystal lattice vibrations in the sample.
Available excitation lasers 405 nm, 532 nm and 785 nm.
Confocal microscope allows 2D and 3D mapping.
Sample temperature can be varied from -195 °C to 600 °C.
Contact: Turkka Salminen
- Micro X-ray Fluorescence Spectrometer, XRF (Bruker Tornado Plus)
Micro-XRF is a technique for analysis of elemental composition. The sample is excited with X-rays and the outcoming characteristic X-rays are used to identify the elemental composition of the sample. Measurement can be performed in air pressure, vacuum or under helium purge, enabling measurement of various types of samples. The system can also provide 2D mapping data of large samples (max scanned area 200 mm x 160 mm).
Detectable element range: Carbon to Americium.
Contact: Turkka Salminen
- Sample preparation
Comprehensive sample preparation equipment for EM studies (cross-section polisher, ion polisher, electrolytical polisher, coating equipment, plasma cleaning)
Comparison table of our SEMs to help you choose the right tool for your samples: https://research.tuni.fi/microscopy/sem-comparison/