Facilities

 

Laboratories

Metaplasmonics Characterization Lab




SI-Cleanroom Virtual Tour (360)

You can have a virtual tour of our cleanroom facilities by panning and scrolling in the 360 Scenes below. Photos © Jarmo Tanskanen.

AFM, FIB, SEM&E-beam lithography

Mask Aligner, Spin-coater, Fume hoods

Etcher, deposition