Facilities

 

Laboratories

Metaplasmonics Characterization Lab




SI-Cleanroom Virtual Tour (360)

You can have a virtual tour of our cleanroom facilities by panning and scrolling in the 360 Scenes below. Photos © Jarmo Tanskanen.

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AFM, FIB, SEM&E-beam lithography

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Mask Aligner, Spin-coater, Fume hoods

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Etcher, deposition